Friction-Induced Nanofabrication: A Review

Abstract As the bridge between basic principles and applications of nanotechnology, nanofabrication methods play significant role in supporting development nanoscale science engineering, which is changing improving production lifestyle human. Photo lithography other alternative technologies, such as nanoimprinting, electron beam lithography, focused ion cutting, scanning probe have brought great progress semiconductor industry, IC manufacturing micro/nanoelectromechanical system (MEMS/NEMS) devices. However, there remains a lot challenges, relating to resolution, cost, speed, so on, realizing high-quality products with further nanotechnology. None existing techniques can satisfy all needs nanoscience nanotechnology at same time, it essential explore new methods. newly developed microscope (SPM)-based friction-induced provides opportunities for maskless, flexible, low-damage, low-cost environment-friendly processing on wide variety materials, including silicon, quartz, glass surfaces, on. It has been proved that this fabrication route broad application prospect nanoimprint templates, microfluidic devices, micro/nano optical structures. This paper hereby involved principals operations nanofabrication, selective etching, were reviewed well looking ahead challenges development. The present review will not only enrich knowledge nanotribology, but also plays positive promoting SPM-based nanofabrication.